Solvaclean – A fluorine F2-based alternative to global warming greenhouse gases to clean the semiconductor tools with lower environmental impact..
Developed in 1863 in Belgium, Solvay provides a solution to Clean water & sanitation, Affordable & clean energy, Green industry & infrastructure, – in line with sustainable development goals for the future.
- Less fluorinated gas used.
- 2200 t CO2 savings based on 30000 wafers.
- No plasma incineration of the waste gas required.
- 2200 t CO2 saving compared to cleaning 30000 wafers with C2F6 – potential to save annually 4.5 Million tons of CO2 equivalent.
- Up to 10% energy savings resulting from plasma sources and no plasma burners .
- Up to 50% water savings.
- Payback time to replace C2F6 is less than 2 years.
- Solvaclean does not need plasma incinerators to destroy remaining C2F6,NF3 or SF6 inducing a cost reduction.
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